MEMS - Fabrication of high energy density, DC bus capacitors. Final report
Technical Report
·
OSTI ID:805871
- Research Organization:
- SatCon Technology Corporation, Cambridge, MA (US)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- FG02-00ER83091
- OSTI ID:
- 805871
- Type / Phase:
- SBIR
- Report Number(s):
- DOE/ER/83091-1
- Country of Publication:
- United States
- Language:
- English
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