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Phase-shifting point-diffraction interferometry at 193 nm

Journal Article · Tue Oct 31 23:00:00 EST 2000 · Applied Optics

DOI:https://doi.org/10.1364/AO.39.005768· OSTI ID:800202

Lee, S H ^[1]; Naulleau, Patrick P; Goldberg, Kenneth A; Piao, F; Oldham, W; Bokor, Jeffrey

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Research Organization:: Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)

Sponsoring Organization:: US Department of Energy (US)

DOE Contract Number:: AC03-76SF00098

OSTI ID:: 800202

Report Number(s):: LBNL/ALS--13688

Journal Information:: Applied Optics, Journal Name: Applied Optics Journal Issue: 31 Vol. 39; ISSN 0003-6935; ISSN APOPAI

Country of Publication:: United States

Language:: English

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Related Subjects

43 PARTICLE ACCELERATORS
ADVANCED LIGHT SOURCE
ADVANCED LIGHT SOURCE ALS
DIFFRACTION
INTERFEROMETRY