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Characterization of multilayer reflective coatings for extreme ultraviolet lithography

Conference ·
OSTI ID:798337
 [1]; ; ; ; ; ; ; ;
  1. LBNL Library
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No abstract prepared.

Research Organization:
Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
798337
Report Number(s):
LBNL/ALS--13667
Country of Publication:
United States
Language:
English

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Related Subjects

43 PARTICLE ACCELERATORS
ADVANCED LIGHT SOURCE
ADVANCED LIGHT SOURCE ALS
REFLECTIVE COATINGS
SYNCHROTRON RADIATION