Skip to main content
OSTI.GOVU.S. Department of Energy Office of Scientific and Technical Information
U.S. Department of Energy
Office of Scientific and Technical Information
 

Extremely fine-pitch printing with a 10x Schwarzschild optic at extreme-ultraviolet wavelengths

Conference ·
OSTI ID:798336
 [1]; ; ; ; ;
  1. LBNL Library
+ Show Author Affiliations

No abstract prepared.

Research Organization:
Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
798336
Report Number(s):
LBNL/ALS--13538
Country of Publication:
United States
Language:
English

Similar Records

Multilayer coatings of 10x projection optics for extreme-ultraviolet lithography
Conference · Sun Feb 28 23:00:00 EST 1999 · OSTI ID:798402
Multilayer coatings of 10X projection optics for extreme-ultraviolet lithography
Conference · Sat Jan 31 23:00:00 EST 1998 · OSTI ID:798408
Multilayer coating and tests of a 10X extreme ultraviolet lithographic camera
Conference · Sat Jan 31 23:00:00 EST 1998 · OSTI ID:794536

Related Subjects

43 PARTICLE ACCELERATORS
ADVANCED LIGHT SOURCE
ADVANCED LIGHT SOURCE ALS
OPTICS
WAVELENGTHS