Interfacial Reactions in Epitaxial Al/TiN(111) Model Diffusion Barriers: Formation of an Impervious Self-limited Wurtzite-structure AlN(0001) Blocking Layer
No abstract prepared.
- Research Organization:
- Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source
- Sponsoring Organization:
- USDOE Office of Energy Research (ER) (US)
- DOE Contract Number:
- AC02-98CH10886
- OSTI ID:
- 796277
- Journal Information:
- J. Appl. Phys., Vol. 89, Issue 12; Other Information: PBD: 15 Jun 2001
- Country of Publication:
- United States
- Language:
- English
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