Characterization of thermal distortion effects on beamline optics for EUV interferometry and soft x-ray microscopy
Journal Article
·
· Review of Scientific Instruments
No abstract prepared.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Advanced Light Source (ALS)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 794660
- Report Number(s):
- LBNL/ALS-236; RSINAK; TRN: US0203480
- Journal Information:
- Review of Scientific Instruments, Vol. 67; Other Information: Journal Publication Date: 1996; PBD: 1 Jan 1996; ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
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