LIGA R and D and prototyping[Lithography, Electroforming, and Assembly]

Conference · Thu Jul 01 00:00:00 EDT 1999

OSTI ID:794629

Boehme, Dale ^[1]; Hruby, Jill M; Bonivert, W D; Bankert, M A; Hackman, J T; Morales, A M; Skala, D M; Griffiths, S K; Ting, A; Bennet, T E; Leith, S D; Chinn, D

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1. LBNL Library

No abstract prepared.

• Research Organization: Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)
• Sponsoring Organization: US Department of Energy (US)
• DOE Contract Number: AC03-76SF00098
• OSTI ID: 794629
• Report Number(s): LBNL/ALS--1522
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
43 PARTICLE ACCELERATORS
ADVANCED LIGHT SOURCE
ADVANCED LIGHT SOURCE ALS
FABRICATION
INTEGRATED CIRCUITS
SYNCHROTRON RADIATION