Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Theoretical Study of Si and N Adsorption on the Si-terminated SiC (001) Surface

Conference ·
We report the results of first principles molecular dynamics simulations of the adsorption of Si and N atoms on a Si-terminated p(2 x 1) SiC(001) surface. In particular, we discuss different structural models for the Si-rich (3 x 2) surface, and the adsorption of 1/8, 1/2 and 1 monolayer nitrogen on the p(2 x 1) surface. Our simulations show that a SiC(001)-p(2 x 1) surface covered by a nitrogen monolayer is an inert substrate which inhibits growth.
Research Organization:
Lawrence Livermore National Lab., CA (US)
Sponsoring Organization:
USDOE Office of Defense Programs (DP) (US)
DOE Contract Number:
W-7405-ENG-48
OSTI ID:
793566
Report Number(s):
UCRL-JC-136232
Country of Publication:
United States
Language:
English

References (37)

The β‐SiC(100) surface studied by low energy electron diffraction, Auger electron spectroscopy, and electron energy loss spectra journal January 1986
Binding and diffusion of a Si adatom on the Si(100) surface journal April 1991
First-principles study of the atomic reconstructions and energies of Ga- and As-stabilized GaAs(100) surfaces journal October 1988
Unified Approach for Molecular Dynamics and Density-Functional Theory journal November 1985
Perfect cellular disorder in a two-dimensional system: Si cells on the 3C-SiC(001) surface journal February 1999
First-principles calculations of β-SiC(001) surfaces journal May 1996
Influence of stress and defects on the silicon-terminated SiC(001) surface structure journal May 1998
Additional dimer-row structure of 3 C -SiC(001) surfaces observed by scanning tunneling microscopy journal August 1994
Highly Stable Si Atomic Line Formation on the β -SiC(100) Surface journal September 1997
Atomic structure of β-SiC(100) surfaces: an ab initio study journal June 1995
Self-limiting growth on the β-SiC(001) surface journal July 1992
Structure of 3×2, 5×2, and 7×2 reconstructed 3 C ‐SiC(001) surfaces obtained during epitaxial growth: Molecular dynamics simulations journal September 1996
Generalized norm-conserving pseudopotentials journal August 1989
Large‐band‐gap SiC, III‐V nitride, and II‐VI ZnSe‐based semiconductor device technologies journal August 1994
Arsenic mediated reconstructions on cubic (001) GaN journal February 1997
Formation of nitride layers on 6H-SiC surfaces journal September 1998
Study of the initial adsorption of nitrogen on SiC(100)-(2 × 1) journal October 1992
Direct Observation of a β -SiC(100)- c ( 4 × 2 ) Surface Reconstruction journal February 1997
Structural analysis of the β-SiC(100)-(2 × 1) surface reconstruction by automated tensor LEED journal January 1992
Theory of the scanning tunneling microscope journal January 1985
First-principles calculations of SiC(001) surface core level shifts journal April 1998
Reconstruction of the Si-terminated β-SiC(100) surface journal April 1998
Electronic structure of the Si-rich 3 C − SiC ( 001 ) 3 × 2 surface journal October 1998
Performance of 3C-SiC thin films as protective coatings for silicon-micromachined atomizers journal March 1998
Surface core levels of the 3 C SiC(001)3×2 surface: Atomic origins and surface reconstruction journal December 1997
Atomic structure of β-SiC( 100) surfaces: a study using the Tersoff potential journal September 1994
Dynamic reflection high‐energy electron diffraction observation of 3C‐SiC(001) surface reconstruction under Si 2 H 6 beam irradiation journal November 1991
Ab initio studies of GaN epitaxial growth on SiC journal June 1995
Elemental composition of β-Sic(001) surface phases studied by medium energy ion scattering journal May 1990
Temperature-Induced Semiconducting c ( 4 × 2 ) ⇔ Metallic ( 2 × 1 ) Reversible Phase Transition on the β -SiC(100) Surface journal November 1997
Atomic Structure of the β -SiC(100)-( 3 × 2 ) Surface journal September 1996
Structure and Properties of Cubic Silicon Carbide (100) Surfaces: A Review journal July 1997
Surface structure and composition of β- and 6H-SiC journal May 1989
The effect of nitrogen on pulsed laser deposition of amorphous silicon carbide films: Properties and structure journal August 1996
Space fluctuation of empty states on 3C-SiC(001) surface journal June 1996
Reconstructions of the Si-terminated (100) surface in β − SiC : A theoretical study journal July 1999
Anomalous weak bonding of Si dimers on the SiC(001) surface? journal November 1997

Similar Records

Adsorption of ethylene on Sn and In terminated Si(001) surface studied by photoelectron spectroscopy and scanning tunneling microscopy
Journal Article · Wed Sep 07 00:00:00 EDT 2016 · Journal of Chemical Physics · OSTI ID:22678889

Interaction Of Water Molecules With SiC(001) Surfaces
Journal Article · Tue Aug 10 00:00:00 EDT 2004 · Published in: Journal of Physical Chemistry B, vol. 108, no. 42, September 29, 2004, pp. 16518-16524 · OSTI ID:15014795

Atomic Control Of Water Interaction With Biocompatible Surfaces: The Case Of SiC(001)
Journal Article · Mon Jul 19 00:00:00 EDT 2004 · Physical Review Letters · OSTI ID:15014585