An Investigation into the Response of a Micro Electro Mechanical Compound Pivot Mirror Using Finite Element Modeling
- Sandia National Laboratories
This report is a presentation of modeling and simulation work for analyzing three designs of Micro Electro Mechanical (MEM) Compound Pivot Mirrors (CPM). These CPMs were made at Sandia National Laboratories using the SUMMiT{trademark} process. At 75 volts and above, initial experimental analysis of fabricated mirrors showed tilt angles of up to 7.5 degrees for one design, and 5 degrees for the other two. Nevertheless, geometric design models predicted higher tilt angles. Therefore, a detailed study was conducted to explain why lower tilt angles occurred and if design modifications could be made to produce higher tilt angles at lower voltages. This study showed that the spring stiffnesses of the CPMs were too great to allow for desired levels of rotation at lower levels of voltage. To produce these lower stiffnesses, a redesign is needed.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (US); Sandia National Labs., Livermore, CA (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 793321
- Report Number(s):
- SAND2002-0247
- Country of Publication:
- United States
- Language:
- English
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