Synthesis of Siloxanes and Silsesquioxanes for 157 NM Microlithography

TRAN, HOANG V; HUNG, RAYMOND J; LOY, DOUGLAS A; WHEELER, DAVID R; BYERS, JEFFREY; CONLEY, WILL; WILSON, C GRANT

Synthesis of Siloxanes and Silsesquioxanes for 157 NM Microlithography

Conference · Thu Mar 22 23:00:00 EST 2001

OSTI ID:784043

TRAN, HOANG V ^[1]; HUNG, RAYMOND J; LOY, DOUGLAS A; WHEELER, DAVID R; BYERS, JEFFREY; CONLEY, WILL; WILSON, C GRANT

Sandia National Laboratories

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Research Organization:: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA

Sponsoring Organization:: USDOE

DOE Contract Number:: AC04-94AL85000

OSTI ID:: 784043

Report Number(s):: SAND2001-0875C

Country of Publication:: United States

Language:: English

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Synthesis of Siloxanes and Silsesquioxanes for 157 NM Microlithography

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