Large microchannel array fabrication and results for DNA sequencing
We have developed a process for the production of microchannel arrays on bonded glass substrates up to I4 x 58 cm, for DNA sequencing. Arrays of 96 and 384 microchannels, each 46 cm long have been built. This technology offers significant advantages over discrete capillaries or conventional slab-gel approaches. High throughput DNA sequencing with over 550 base pairs resolution has been achieved. With custom fabrication apparatus, microchannels are etched in a borosilicate substrate, and then fusion bonded to a top substrate 1.1 mm thick that has access holes formed in it. SEM examination shows a typical microchannel to be 40 x 180 micrometers by 46 cm Iong; the etch is approximately isotropic, leaving a key undercut, for forming a rounded channel. The surface roughness at the bottom of the 40 micrometer deep channel has been profilometer measured to be as low as 20 nm; the roughness at the top surface was 2 nm. Etch uniformity of about 5% has been obtained using a 22% vol. HF / 78% Acetic acid solution. The simple lithography, etching, and bonding of these substrates enables efficient production of these arrays and extremely precise replication From master masks and precision machining with a mandrel. Keywords: microchannels, microchannel plates, DNA sequencing, electrophoresis, borosilicate glass
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE Office of Environment, Safety and Health (EH)
- DOE Contract Number:
- W-7405-Eng-48
- OSTI ID:
- 7804
- Report Number(s):
- UCRL-JC-132763; KP1103010; ON: DE00007804
- Resource Relation:
- Conference: Micro and Nanofabricated Structures and Devices for Biomedical Environmental Applications II, SPIE's BiOS'99 International Biomedical Optics Symposium, San Jose, CA, January 23-29, 1999
- Country of Publication:
- United States
- Language:
- English
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