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Early phase laser induced plasma diagnostics and mass removal during single pulse laser ablation of silicon

Journal Article · Wed Mar 31 23:00:00 EST 1999 · Spectrochimica Acta Part B

DOI:https://doi.org/10.1016/S0584-8547(99)00092-0· OSTI ID:771697

Liu, H C ^[1]; Mao, X L; Yoo, J H; Russo, R E

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Research Organization:: Lawrence Berkeley National Lab., CA (US)

Sponsoring Organization:: USDOE Assistant Secretary for Environmental Management (US)

DOE Contract Number:: AC03-76SF00098

OSTI ID:: 771697

Report Number(s):: LBNL--43861

Journal Information:: Spectrochimica Acta Part B, Journal Name: Spectrochimica Acta Part B Journal Issue: 11 Vol. 54

Country of Publication:: United States

Language:: English

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Related Subjects

36 MATERIALS SCIENCE
ABLATION
LASER-RADIATION HEATING
PLASMA DIAGNOSTICS
REMOVAL
SILICON