The Influence of Coating Structure on Micromachine Stiction

Journal Article · Tue Oct 03 04:00:00 EDT 2000 · Tribology Letters

OSTI ID:764818

Kushmerick, J G ^[1]; Hankins, M G; De Boer, M P; Clews, P J; Carpick, R W; Bunker, B C

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1. Sandia National Laboratories

We have clearly shown that the film morphology dictates the anti-stiction properties of FDTS coatings. Release stiction is not observed when ideal monolayer films are present but can be extensive when thicker aggregate structures are present. This finding is significant because it indicates that agglomerate formation during processing is a major source of irreproducible behavior when FDTS coatings are used to release micromachined parts. The results could also help explain why coatings that are aged at high. humidity start to stick to each other. (AFM results show that humid environments promote the formation of aggregates from monolayer films.) The reason why aggregate structures promote stiction is currently unknown. However, it appears that aggregates interfere with the ability of FDTS to form dense, well-ordered coatings under microstructures, leading to surfaces that are sufficiently hydrophilic to allow for release stiction via an attractive Laplace force during drying.

• Research Organization: Sandia National Laboratories, Albuquerque, NM (US); Sandia National Laboratories, Livermore, CA (US)
• Sponsoring Organization: US Department of Energy (US)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 764818
• Report Number(s): SAND2000-2453J
• Journal Information: Tribology Letters, Journal Name: Tribology Letters
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
COATINGS
DRYING
HUMIDITY
MICROELECTRONICS
MINIATURIZATION
MORPHOLOGY