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U.S. Department of Energy
Office of Scientific and Technical Information

Microfabrication and Micropatterning with Soft Lithography

Conference ·
OSTI ID:761861

No abstract prepared.

Research Organization:
Sandia National Labs., Albuquerque, NM (US); Sandia National Labs., Livermore, CA (US)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
761861
Report Number(s):
SAND2000-2029C
Country of Publication:
United States
Language:
English

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