Failure Analysis of Tungsten Coated Polysilicon Micromachined Microengines
Conference
·
OSTI ID:761839
No abstract prepared.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 761839
- Report Number(s):
- SAND2000-1923C; TRN: AH200103%%86
- Resource Relation:
- Conference: SPIE: Micromachining and Microfabrication, Santa Clara, CA (US), 09/18/2000--09/20/2000; Other Information: PBD: 31 Jul 2000
- Country of Publication:
- United States
- Language:
- English
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