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Failure Analysis of Tungsten Coated Polysilicon Micromachined Microengines

Conference ·
OSTI ID:761839
 [1]; ; ; ; ; ; ; ;
  1. Sandia National Laboratories
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No abstract prepared.
Research Organization:
Sandia National Labs., Albuquerque, NM (US); Sandia National Labs., Livermore, CA (US)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
761839
Report Number(s):
SAND2000-1923C
Country of Publication:
United States
Language:
English

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Related Subjects

42 ENGINEERING
ATOMIC FORCE MICROSCOPY
COATINGS
ELECTRON ENERGY LOSS SPECTROSCOPY
ENGINES
FAILURE MODE ANALYSIS
FOCUSED ION BEAM
MEMS
MINIATURIZATION
SCANNING ELECTRON MICROSCOPY
SILICON
TRANSMISSION ELECTRON MICROSCOPY
TUNGSTEN