Increased medium-range order in amorphous silicon with increased substrate temperature
Conference
·
OSTI ID:761273
Using fluctuation electron microscopy, the authors have measured the medium-range order of magnetron sputtered silicon thin films as a function of substrate temperature from the amorphous to polycrystalline regimes. They find a smooth increase in the medium-range order of the samples, which they interpret in the context of the paracrystalline structural model as an increase in the size of and/or volume fraction occupied by the paracrystalline grains. These data are counter to the long-standing belief that there is a sharp transition between amorphous and polycrystalline structures as a function of substrate temperature.
- Research Organization:
- Argonne National Lab., IL (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 761273
- Report Number(s):
- ANL/MSD/CP-102632
- Country of Publication:
- United States
- Language:
- English
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