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Title: MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes

Abstract

The burgeoning new technology of Micro-Electro-Mechanical Systems (MEMS) shows great promise in the weapons arena. We can now conceive of micro-gyros, micro-surety systems, and micro-navigators that are extremely small and inexpensive. Do we want to use this new technology in critical applications such as nuclear weapons? This question drove us to understand the reliability and failure mechanisms of silicon surface-micromachined MEMS. Development of a testing infrastructure was a crucial step to perform reliability experiments on MEMS devices and will be reported here. In addition, reliability test structures have been designed and characterized. Many experiments were performed to investigate failure modes and specifically those in different environments (humidity, temperature, shock, vibration, and storage). A predictive reliability model for wear of rubbing surfaces in microengines was developed. The root causes of failure for operating and non-operating MEMS are discussed. The major failure mechanism for operating MEMS was wear of the polysilicon rubbing surfaces. Reliability design rules for future MEMS devices are established.

Authors:
; ; ; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Sandia National Labs., Albuquerque, NM (US); Sandia National Labs., Livermore, CA (US)
Sponsoring Org.:
US Department of Energy (US)
OSTI Identifier:
750344
Report Number(s):
SAND2000-0091
TRN: US200221%%299
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Technical Report
Resource Relation:
Other Information: PBD: 1 Jan 2000
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 45 MILITARY TECHNOLOGY, WEAPONRY, AND NATIONAL DEFENSE; MICROELECTRONIC CIRCUITS; MINIATURIZATION; WEAPONS; DESIGN; RELIABILITY; PERFORMANCE TESTING; FAILURE MODE ANALYSIS; WEAR

Citation Formats

TANNER,DANELLE M., SMITH,NORMAN F., IRWIN,LLOYD W., EATON,WILLIAM P., HELGESEN,KAREN SUE, CLEMENT,J. JOSEPH, MILLER,WILLIAM M., MILLER,SAMUEL L., DUGGER,MICHAEL T., WALRAVEN,JEREMY A., and PETERSON,KENNETH A. MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes. United States: N. p., 2000. Web. doi:10.2172/750344.
TANNER,DANELLE M., SMITH,NORMAN F., IRWIN,LLOYD W., EATON,WILLIAM P., HELGESEN,KAREN SUE, CLEMENT,J. JOSEPH, MILLER,WILLIAM M., MILLER,SAMUEL L., DUGGER,MICHAEL T., WALRAVEN,JEREMY A., & PETERSON,KENNETH A. MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes. United States. doi:10.2172/750344.
TANNER,DANELLE M., SMITH,NORMAN F., IRWIN,LLOYD W., EATON,WILLIAM P., HELGESEN,KAREN SUE, CLEMENT,J. JOSEPH, MILLER,WILLIAM M., MILLER,SAMUEL L., DUGGER,MICHAEL T., WALRAVEN,JEREMY A., and PETERSON,KENNETH A. Sat . "MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes". United States. doi:10.2172/750344. https://www.osti.gov/servlets/purl/750344.
@article{osti_750344,
title = {MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes},
author = {TANNER,DANELLE M. and SMITH,NORMAN F. and IRWIN,LLOYD W. and EATON,WILLIAM P. and HELGESEN,KAREN SUE and CLEMENT,J. JOSEPH and MILLER,WILLIAM M. and MILLER,SAMUEL L. and DUGGER,MICHAEL T. and WALRAVEN,JEREMY A. and PETERSON,KENNETH A.},
abstractNote = {The burgeoning new technology of Micro-Electro-Mechanical Systems (MEMS) shows great promise in the weapons arena. We can now conceive of micro-gyros, micro-surety systems, and micro-navigators that are extremely small and inexpensive. Do we want to use this new technology in critical applications such as nuclear weapons? This question drove us to understand the reliability and failure mechanisms of silicon surface-micromachined MEMS. Development of a testing infrastructure was a crucial step to perform reliability experiments on MEMS devices and will be reported here. In addition, reliability test structures have been designed and characterized. Many experiments were performed to investigate failure modes and specifically those in different environments (humidity, temperature, shock, vibration, and storage). A predictive reliability model for wear of rubbing surfaces in microengines was developed. The root causes of failure for operating and non-operating MEMS are discussed. The major failure mechanism for operating MEMS was wear of the polysilicon rubbing surfaces. Reliability design rules for future MEMS devices are established.},
doi = {10.2172/750344},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sat Jan 01 00:00:00 EST 2000},
month = {Sat Jan 01 00:00:00 EST 2000}
}

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