Modeling the KrF laser discharge
Journal Article
·
· Appl. Phys. Lett.; (United States)
Modeling of an E-beam-controlled discharge operated in gas mixtures containing mainly argon with approximately 10% krypton and a few tenths of a percent fluorine is described. The discharge physics is dominated by electron impact ionization and excitation of the rare-gas metastables. The ionization of the metastables impacts the discharge stability directly while their excitation strongly affects the efficiency of pumping KrF*. Predictions of the model are compared with experimental results. (AIP)
- Research Organization:
- Avco Everett Research Laboratory, Incorporated, Everett, Massachusetts 02149
- OSTI ID:
- 7365328
- Journal Information:
- Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 28:12; ISSN APPLA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
42 ENGINEERING
420300* -- Engineering-- Lasers-- (-1989)
ARGON
BEAMS
EFFICIENCY
ELECTRIC DISCHARGES
ELECTRON BEAMS
ELEMENTS
EMISSION SPECTRA
ENERGY LEVELS
ENERGY-LEVEL TRANSITIONS
EXCITATION
EXCITED STATES
FLUORESCENCE
FLUORIDES
FLUORINE
FLUORINE COMPOUNDS
GAS LASERS
GLOW DISCHARGES
HALIDES
HALOGEN COMPOUNDS
HALOGENS
IONIZATION
KRYPTON
KRYPTON COMPOUNDS
KRYPTON FLUORIDES
LASERS
LEPTON BEAMS
LUMINESCENCE
METASTABLE STATES
NONMETALS
PARTICLE BEAMS
RARE GAS COMPOUNDS
RARE GASES
SPECTRA
420300* -- Engineering-- Lasers-- (-1989)
ARGON
BEAMS
EFFICIENCY
ELECTRIC DISCHARGES
ELECTRON BEAMS
ELEMENTS
EMISSION SPECTRA
ENERGY LEVELS
ENERGY-LEVEL TRANSITIONS
EXCITATION
EXCITED STATES
FLUORESCENCE
FLUORIDES
FLUORINE
FLUORINE COMPOUNDS
GAS LASERS
GLOW DISCHARGES
HALIDES
HALOGEN COMPOUNDS
HALOGENS
IONIZATION
KRYPTON
KRYPTON COMPOUNDS
KRYPTON FLUORIDES
LASERS
LEPTON BEAMS
LUMINESCENCE
METASTABLE STATES
NONMETALS
PARTICLE BEAMS
RARE GAS COMPOUNDS
RARE GASES
SPECTRA