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Modeling the KrF laser discharge

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.88629· OSTI ID:7365328
Modeling of an E-beam-controlled discharge operated in gas mixtures containing mainly argon with approximately 10% krypton and a few tenths of a percent fluorine is described. The discharge physics is dominated by electron impact ionization and excitation of the rare-gas metastables. The ionization of the metastables impacts the discharge stability directly while their excitation strongly affects the efficiency of pumping KrF*. Predictions of the model are compared with experimental results. (AIP)
Research Organization:
Avco Everett Research Laboratory, Incorporated, Everett, Massachusetts 02149
OSTI ID:
7365328
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 28:12; ISSN APPLA
Country of Publication:
United States
Language:
English