Vaporization thermodynamics and molecular sputtering of binary targets
Journal Article
·
· Nucl. Technol.; (United States)
OSTI ID:7362131
Impurity control in magnetically-confined thermonuclear plasmas depends in part on control of sputtered products arising from plasma particle--first wall interactions. Although sputtering of unitary targets (metals) is reasonably well understood, sputtering of binary targets (oxides) lacks a sound theoretical base. It was demonstrated that molecular species can dominate the total sputtered product from ion-bombarded aluminum oxide surfaces. The nature of the bombarding ion (Ar/sup +/ versus H/sup +/), the nature of the target surface, as well as the ion flux and fluence, determine the fraction of sputtered species appearing as aluminum atoms or Al/sub 2/O and AlO molecules. The results show that the materials sensitive parameters entering collision cascade theory are the surface binding energies of the sputtered species. The surface binding energies in turn are functions of the surface composition prevailing at the time of a particular sputtering event, and are identified with the partial molar enthalpies of vaporization of the sputtered species. This approach provides the rationalization of the complex distribution of sputtered products encountered in studies of secondary ion emission from binary targets.
- Research Organization:
- Argonne National Lab., IL
- OSTI ID:
- 7362131
- Journal Information:
- Nucl. Technol.; (United States), Journal Name: Nucl. Technol.; (United States) Vol. 29:3; ISSN NUTYB
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360106 -- Metals & Alloys-- Radiation Effects
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700209* -- Fusion Power Plant Technology-- Component Development & Materials Testing
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
ARGON IONS
BEAMS
BINDING ENERGY
CHALCOGENIDES
CHARGED PARTICLES
ENERGY
EVAPORATION
FIRST WALL
IONS
NUCLEON BEAMS
OXIDES
OXYGEN COMPOUNDS
PARTICLE BEAMS
PHASE TRANSFORMATIONS
PROTON BEAMS
SPUTTERING
THERMODYNAMICS
THERMONUCLEAR REACTOR WALLS
360106 -- Metals & Alloys-- Radiation Effects
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700209* -- Fusion Power Plant Technology-- Component Development & Materials Testing
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
ARGON IONS
BEAMS
BINDING ENERGY
CHALCOGENIDES
CHARGED PARTICLES
ENERGY
EVAPORATION
FIRST WALL
IONS
NUCLEON BEAMS
OXIDES
OXYGEN COMPOUNDS
PARTICLE BEAMS
PHASE TRANSFORMATIONS
PROTON BEAMS
SPUTTERING
THERMODYNAMICS
THERMONUCLEAR REACTOR WALLS