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Temperature and velocity profiles and energy balances for an inductively coupled plasma discharge in nitrogen

Journal Article · · J. Appl. Phys.; (United States)
DOI:https://doi.org/10.1063/1.323266· OSTI ID:7357944
Modification of a mathematical model described originally by Miller and Ayen to predict radial and axial temperature profiles in an inductively coupled plasma discharge was developed and applied to nitrogen. The modified model incorporates an updated description of three-concentric gas-flow patterns now common in spectrochemical applications. Temperature and velocity profiles and energy-balance distributions were demonstrated for a variety of input power levels and central flow rates. These results parallel similar results for well-characterized argon discharges. The modified plasma model depends upon the application of a weighted average of previous and current computed temperature values in achieving a stable numerical solution. (AIP)
Research Organization:
Department of Chemistry, University of Massachusetts, Amherst, Massachusetts 01002
OSTI ID:
7357944
Journal Information:
J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 47:9; ISSN JAPIA
Country of Publication:
United States
Language:
English