Temperature-dependent property measurements on multi-electroded thin-layer dielectrics
- Department of Materials Science and Engineering, Materials Research Laboratory, and Beckman Institute, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801 (United States)
A measurement system was designed and assembled for the automatic collection of electrical data for thin-layer dielectrics as a function of temperature. The dielectrics were deposited on platinized silicon by sol-gel processing, and the dielectric thickness was 0.2--0.4 [mu]m. Many ([gt]25) surface electrodes were formed by sputtering gold through a shadow mark, with a typical electrode size of 210[times]210 [mu]m[sup 2]. The measurement equipment was computer controlled, with three-axis digital stepping motors that could scan multi-electroded capacitors and collect statistically meaningful data. The temperature-dependent properties were measured between [minus]100 and 300 [degree]C as a function of frequency (100 Hz to 1 MHz) and applied field strength (0--50 MV/m). Data are reported for sol-gel-derived BaTiO[sub 3], PbZrO[sub 3], and (Pb,La)(Zr,Ti)O[sub 3] (i.e., PLZT) thin-layer capacitors. Capacitance values were typically 500--1000 pF, and the dielectric constant could be determined within a standard deviation of [plus minus]1.3%. Nanocrystalline BaTiO[sub 3] was found to have a dielectric constant of 210 at room temperature with no ferroelectric properties or dielectric anomalies between [minus]80 and 200 [degree]C. Antiferroelectric PbZrO[sub 3] had characteristic field-forced phase transformation behavior to the ferroelectric state with increasing bias. The field-induced polarization was approximately 300 mC/m[sup 2] and the coercive field was 22--28 MV/m. PLZT 8/65/35 had a dielectric constant of 556[plus minus]7 at 25 [degree]C, 100 KHz, and 50 mV.
- DOE Contract Number:
- FG02-91ER45439
- OSTI ID:
- 7275216
- Journal Information:
- Review of Scientific Instruments; (United States), Journal Name: Review of Scientific Instruments; (United States) Vol. 65:6; ISSN 0034-6748; ISSN RSINAK
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360606* -- Other Materials-- Physical Properties-- (1992-)
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CAPACITANCE
DATA ACQUISITION SYSTEMS
DIELECTRIC MATERIALS
ELECTRICAL PROPERTIES
ELECTRODES
FREQUENCY DEPENDENCE
FREQUENCY RANGE
HZ RANGE
KHZ RANGE
LANTHANUM COMPOUNDS
LAYERS
LEAD COMPOUNDS
MATERIALS
OXYGEN COMPOUNDS
PERMITTIVITY
PHYSICAL PROPERTIES
PLZT
POLARIZATION
RARE EARTH COMPOUNDS
SOL-GEL PROCESS
TEMPERATURE DEPENDENCE
TEMPERATURE RANGE
TEMPERATURE RANGE 0065-0273 K
TEMPERATURE RANGE 0273-0400 K
TEMPERATURE RANGE 0400-1000 K
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
ZIRCONATES
ZIRCONIUM COMPOUNDS