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Formation and quenching kinetics of ArF

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.89597· OSTI ID:7260255

In this paper we report on the formation and quenching kinetics of ArF* (/sup 2/..sigma../sub 1///sub 2/). The ArF* is produced by irradiating mixtures of Ar and F/sub 2/. The primary formation channel is via the recombination of Ar/sup +/ and Ar/sup +//sub 2/ with F/sup -/. Quenching of ArF* by F/sub 2/ and Ar have been measured by analyzing the ArF* /sup 2/..sigma../sub 1///sub 2/..-->../sup 2/..sigma../sub 1///sub 2/ fluorescence as a function of the F/sub 2/ and Ar partial pressures. We have also measured the displacement of the Ar in ArF* by Kr and Xe to form KrF* and XeF*, respectively.

Research Organization:
Avco Everett Research Laboratory, Inc., Everett, Massachusetts 02149
OSTI ID:
7260255
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 31:2; ISSN APPLA
Country of Publication:
United States
Language:
English