Thin Si sub 3 N sub 4 windows for MeV ions
- Oregon Univ., Eugene, OR (USA). Dept. of Physics
- Lawrence Livermore National Lab., CA (USA)
We report here the results of studies on (nominal) Si{sub 3}N{sub 4} ultra-thin windows for bringing MeV protons out of vacuum into ambient air with small scattering. The windows were made by anisotropic etching of Si to expose about a square millimeter of silicon nitride film integrally attached to a silicon frame. Three sets of windows of different thicknesses were tested. A number from each set were broken out of the wafers and attached over one mm holes in Aluminum plates with epoxy cement. The windows were successively placed under roughing vacuum using a lubricated O'' ring for a vacuum seal. Breaking pressure was recorded for windows that did not survive. Radius of curvature of films that did survive was obtained by measuring the optical focal length in reflection. Stress and strain were deduced and the results are tabulated. Young's modulus obtained from the data assuming Poisson's ratio to be 0.3 is 346 GPa. That value is compared with values from the literature. 4 refs., 6 figs., 6 tabs.
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- DOE/DP
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 7247880
- Report Number(s):
- UCID-21935; ON: DE90008092
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
PROTON BEAMS
SCATTERING
SILICON NITRIDES
BEAM OPTICS
AIR
FOCUSING
OPTICAL DISPERSION
STRAINS
STRESSES
THIN FILMS
BEAMS
FILMS
FLUIDS
GASES
NITRIDES
NITROGEN COMPOUNDS
NUCLEON BEAMS
PARTICLE BEAMS
PNICTIDES
SILICON COMPOUNDS
430303* - Particle Accelerators- Experimental Facilities & Equipment
656003 - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-)