Method and apparatus for extracting well-formed, high current ion beams from a plasma source
Patent
·
OSTI ID:7245261
A well-formed ion beam having a high current is extracted from an ion plasma by a low perveance ion extraction system including focus and extraction electrodes, the extraction electrode having an ion exit aperture and being axially spaced from the focus electrode a distance of at least several times the diameter of the ion exit aperture. A voltage differential is applied between the electrodes to define a plasma sheath at the ion source aperture, and the ion beam is extracted from the plasma sheath.
- Assignee:
- Accelerators, Inc.
- Patent Number(s):
- US 3955091
- OSTI ID:
- 7245261
- Country of Publication:
- United States
- Language:
- English
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