Kinetic model of a DC oxygen glow discharge

Journal Article · Thu Jun 01 04:00:00 EDT 1989 · Plasma Chemistry and Plasma Processing; (USA)

DOI:https://doi.org/10.1007/BF01054280· OSTI ID:7243934

Gousset, G; Touzeau, M; Vialle, M ^[1]; Ferreira, C M ^[2]

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1. Universite de Paris-Sud, Orsay (France)
2. INIC Instito Superior Tecnico, Lisboa (Portugal)

A simple kinetic model predicting the concentration of oxygen atoms, metastable singlet molecules O{sub 2}(a{sup 1}{Delta}) and negative ions O{minus} in the positive column of a DC glow discharge is developed. The calculated O and O{sub 2}(a{sup 1}{Delta}) concentrations are compared to previously reported measurements for pressures p = 0.2-2 Torr and discharge currents I = 10-80 mA. The electron density calculated from the continuity equation j = n{sub e}e v{sub d} agrees well experiment. The rate coefficients for electron impact processes used in the balance equations of O, O{sub 2}(a{sup 1}{Delta}), and O{sup {minus}} were taken from the literature as a function of the reduced electric field E/N for E/N = 40-80 Td. A reasonable agreement is obtained between the model and the experiment with a set of 10 reactions for the production and destruction of the above-mentioned species.

• OSTI ID: 7243934
• Journal Information: Plasma Chemistry and Plasma Processing; (USA), Journal Name: Plasma Chemistry and Plasma Processing; (USA) Vol. 9:2; ISSN PCPPD; ISSN 0272-4324
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ATOMIC IONS
CHARGED PARTICLES
COLLISIONS
DISSOCIATION
ELECTRIC DISCHARGES
ELECTRIC FIELDS
ELECTRON COLLISIONS
ELECTRON DENSITY
ELECTRON-MOLECULE COLLISIONS
ELEMENTS
ENERGY LEVELS
ENERGY LOSSES
EXCITED STATES
GLOW DISCHARGES
ION DENSITY
ION SOURCES
IONIZATION
IONS
KINETICS
LOSSES
MATHEMATICAL MODELS
METASTABLE STATES
MOLECULAR IONS
MOLECULE COLLISIONS
NONMETALS
OXYGEN
OXYGEN IONS
OZONE
PLASMA DENSITY
PLASMA PRODUCTION
PLASMA SIMULATION
RECOMBINATION
SIMULATION