Coevaporation of Cr--Cu and Mo--Ag

Journal Article · Fri Jul 01 04:00:00 EDT 1988 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.575557· OSTI ID:7202713

Kim, J; Wen, S H; Yee, D

Structures of Cr--Cu and Mo--Ag thin films coevaporated onto various substrates have been investigated by transmission electron microscopy and x-ray diffractometry. Also studied are their grain sizes, lattice constants, electrical resistivities, and the thermal stabilities in association with the film composition and the substrate temperature. It is found that Cu is soluble in the Cr lattice up to 60% when coevaporated at room temperature forming a metastable phase. At elevated temperatures, the solubility decreases slowly and the equilibrium phase, a mixture of fcc Cu and bcc Cr phases, starts to form at the 25% Cr/75% Cu composition region. The bcc metastable phase formation is preferred to the fcc phase when these two elements are coevaporated with a 1:1 ratio. Substrate orientation is found to have very little effect in determining the resulting crystal structure of the film. The same results have been found in the case of Ag--Mo coevaporation.

• Research Organization: IBM Thomas J. Watson Research Center, Yorktown Heights, New York 10598
• OSTI ID: 7202713
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 6:4; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360102* -- Metals & Alloys-- Structure & Phase Studies
360104 -- Metals & Alloys-- Physical Properties
CHEMICAL COMPOSITION
CHROMIUM
COHERENT SCATTERING
COPPER
CRYSTAL STRUCTURE
CRYSTAL-PHASE TRANSFORMATIONS
DATA
DIFFRACTION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON MICROSCOPY
ELEMENTS
EVAPORATION
EXPERIMENTAL DATA
FILMS
GRAIN SIZE
INFORMATION
LATTICE PARAMETERS
METALS
MICROSCOPY
MICROSTRUCTURE
MOLYBDENUM
NUMERICAL DATA
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
SCATTERING
SILVER
SIZE
SOLUBILITY
STABILITY
THIN FILMS
TRANSITION ELEMENTS
TRANSMISSION ELECTRON MICROSCOPY
X-RAY DIFFRACTION