Incoherent laser system for producing smooth and controllable spatial illumination profiles
Patent
·
OSTI ID:7198987
It is an object of the invention to provide an incoherent-laser system for producing smooth and controllable spatial-illumination profiles. It is an object of the invention to provide a KrF laser system wherein undesirable aberration effects are avoided or rendered innocuous. It is an object of this invention to obtain smooth and controllable spatial-illumination profiles on targets by an incoherent light source in an inexpensive and reliable manner. It is another object of this invention to provide an optical system that uses incoherent light to produce a smooth and controllable spatial-illumination profile without requiring the use of echelon-like gratings that break a light beam into differently delayed beamlets that overlap at a target.
- Research Organization:
- Department of the Navy, Washington, DC (USA)
- Assignee:
- Dept. of the Navy, Washington, DC
- Patent Number(s):
- None
- OSTI ID:
- 7198987
- Country of Publication:
- United States
- Language:
- English
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