Experimental study of spontaneous ignition limit of oxygen-lean silane mixtures

Journal Article · Wed Jun 01 00:00:00 EDT 1994 · Combustion and Flame; (United States)

DOI:https://doi.org/10.1016/0010-2180(94)90022-1· OSTI ID:7184968

Kondo, Shigeo; Tokuhashi, Kazuaki; Nagai, Hidekazu; Iwasaka, Masaji; Kaise, Masahiro ^[1]

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1. National Inst. of Materials and Chemical Research, Ibaraki (Japan)

Silane is widely used as feedstock gas for CVD process in semiconductor industry. It is also noted for its pyrophoric nature. The mechanism of silane combustion is important from both points of view. The spontaneous ignition of a premixed silane--oxygen--nitrogen system has been investigated under a variety of conditions. It has been found that the autoignition temperatures are lower than room temperature if the oxygen concentration is extremely low. The spontaneous ignition of silane results from the extremely oxygen-lean mixtures instantaneously produced when silane or silane mixture is poured into the air.

• OSTI ID: 7184968
• Journal Information: Combustion and Flame; (United States), Journal Name: Combustion and Flame; (United States) Vol. 97:3-4; ISSN CBFMAO; ISSN 0010-2180
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400800* -- Combustion
Pyrolysis
& High-Temperature Chemistry
CHEMICAL COATING
CHEMICAL REACTION KINETICS
CHEMICAL REACTIONS
CHEMICAL VAPOR DEPOSITION
COMBUSTION
COMBUSTION KINETICS
DEPOSITION
FUEL-AIR RATIO
HYDRIDES
HYDROGEN COMPOUNDS
KINETICS
MATERIALS
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
OXIDATION
REACTION KINETICS
SEMICONDUCTOR MATERIALS
SILANES
SILICON COMPOUNDS
SPONTANEOUS COMBUSTION
SURFACE COATING
THERMOCHEMICAL PROCESSES