Direct formation of (CH sub 3 ) sub 2 HSiCl from silicon and CH sub 3 Cl
- Univ. of Colorado, Boulder (USA)
A Cu-catalyzed reaction procedure was found for the selective formation of dimethylchlorosilane ((CH{sub 3}){sub 2}HSiCl) from the direct reaction of CH{sub 3}Cl with solid Si. The new procedure is a two-step process. A Cu/Si sample is prepared by evaporating Cu onto clean polycrystalline Si under ultrahigh vacuum, and the Cu/Si surface is first activated by exposure to 10% HSiCl{sub 3}/CH{sub 3}Cl at 598 K. After the HSiCl{sub 3}CH{sub 3}Cl mixture is evacuated from the reactor, the activated Cu/Si surface is reacted in fresh CH{sub 3}Cl. For low surface concentrations of Cu, the partially hydrogenated silane, (CH{sub 3}){sub 2}HSiCl, is selectively produced. Trichlorosilane was also found to activate polycrystalline Si (in the absence of Cu) for production of highly chlorinated methylchlorosilanes at a much higher rate than on the Cu/Si surface but with poor selectively to (CH{sub 3}){sub 2}HSiCl. All reactions are carried out at atmospheric pressure in a reactor that is attached to an ultrahigh-vacuum chamber. This allows surface analysis of Auger electron spectroscopy, which detected SiCl{sub x} on reacted surfaces. These SiCl{sub x} sites, which appear necessary for methylchlorosilane formation, are apparently formed during activation by HSiCl{sub 3}.
- OSTI ID:
- 7157768
- Journal Information:
- Journal of Physical Chemistry; (USA), Journal Name: Journal of Physical Chemistry; (USA) Vol. 93:14; ISSN JPCHA; ISSN 0022-3654
- Country of Publication:
- United States
- Language:
- English
Similar Records
Electronic structure factors of Si-H bond activation by transition metals. Valence photoelectron spectra of (. eta. sup 5 -C sub 5 H sub 4 CH sub 3 )Mn(CO)(PMe sub 3 )HSiCl sub 3 and (. eta. sup 5 -C sub 5 H sub 4 CH sub 3 )Mn(CO)(PMe sub 3 )HSiHPh sub 2 (Me = CH sub 3 , Ph = C sub 6 H sub 5 )
Observation of HSiCl by laser-induced microfluorescence during the direct laser writing of silicon microstructures
Related Subjects
360603* -- Materials-- Properties
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400400 -- Electrochemistry
DATA
DATA ANALYSIS
ELEMENTS
EXPERIMENTAL DATA
HYDRIDES
HYDROGEN COMPOUNDS
INFORMATION
MATERIALS
MEASURING INSTRUMENTS
MEASURING METHODS
NUMERICAL DATA
ORGANIC CHLORINE COMPOUNDS
ORGANIC COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
ORGANIC SILICON COMPOUNDS
SEMICONDUCTOR MATERIALS
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS
SYNTHESIS