Use of Au-In-Pd and Pd-In electroless deposits for ohmic contacts on n-GaAs

Journal Article · Mon Jan 01 04:00:00 EST 1990 · Journal of the Electrochemical Society; (USA)

DOI:https://doi.org/10.1149/1.2086378· OSTI ID:7156557

Stremsdoefer, G; Martin, J R; Clechet, P ^[1]; Nguyen-Du, ^[2]

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1. Laboratoire de Physicochimie des interfaces, Ecole Centrale de Lyon, BP 163, 69131 Ecully Cedex (FR)
2. Laboratoire de Metallurgie Structurale, Ecole Centrale de Lyon, BP 163, 69131 Ecully Cedex (FR)

Codeposition of gold-palladium-indium and palladium-indium alloys onto n-GaAs substrates is obtained in an acidic medium by the electroless method. The preparation and characteristics of the different baths are presented. For the Pd-In alloys, a crystalline refractory Pd(In){sub 3} compound is initially formed, whereas after a 2 min annealing treatment at 470{degrees}C traces of InAs and PdGa are found. A high-quality ohmic contact having {rho} = 6.10{sup {minus} 6} {Omega} cm{sup 2} is obtained with annealing.

• OSTI ID: 7156557
• Journal Information: Journal of the Electrochemical Society; (USA), Journal Name: Journal of the Electrochemical Society; (USA) Vol. 137:1; ISSN JESOA; ISSN 0013-4651
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360101* -- Metals & Alloys-- Preparation & Fabrication
360601 -- Other Materials-- Preparation & Manufacture
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
ALLOYS
ANNEALING
ARSENIC COMPOUNDS
ARSENIDES
CHEMICAL REACTION KINETICS
COPRECIPITATION
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
GOLD ALLOYS
HEAT TREATMENTS
INDIUM ALLOYS
KINETICS
MATERIALS
N-TYPE CONDUCTORS
PALLADIUM ALLOYS
PLATINUM METAL ALLOYS
PNICTIDES
PRECIPITATION
REACTION KINETICS
SEMICONDUCTOR MATERIALS
SEPARATION PROCESSES