Determination of Young's modulus of thin films

Journal Article · Thu Oct 01 00:00:00 EDT 1992 · Journal of the American Ceramic Society; (United States)

DOI:https://doi.org/10.1111/j.1151-2916.1992.tb05533.x· OSTI ID:7140158

Maddalena, A ^[1]

---

1. Dipt. di Ingegneria Meccanica Sezione Materiali, Univ. di Padova, 35100 Padova (Italy)

In this paper, an improved vibrating-reed method is described for determining Young's modulus of thin films deposited on both sides of a substrate. This technique consists of measuring the resonant frequency of a cantilever composite beam obtained by coating both sides of a substrate. The calculation procedure is presented to evaluate the film modulus from sample geometry, material density, and mechanical resonant frequency. For accurate determination of resonant frequency, the phase angle between the exciting and vibration signals is analyzed. Using the proposed technique, Young's modulus of ZrO[sub 2] thin films is calculated, obtaining a value in agreement with literature data.

• OSTI ID: 7140158
• Journal Information: Journal of the American Ceramic Society; (United States), Journal Name: Journal of the American Ceramic Society; (United States) Vol. 75:10; ISSN 0002-7820; ISSN JACTAW
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
CHALCOGENIDES
COVERINGS
DENSITY
FILMS
FREQUENCY MEASUREMENT
GEOMETRY
MATHEMATICS
MEASURING METHODS
MECHANICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
PHASE SHIFT
PHYSICAL PROPERTIES
RESONANCE
SUBSTRATES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
YOUNG MODULUS
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES