AEM-based XEDS/EELS microanalysis: a materials science perspective
Conference
·
OSTI ID:7130541
Nearly 50% of electron microscopes sold today come equipped for X-ray Energy Dispersive Spectroscopy (XEDS), and Electron Energy Loss Spectroscopy (EELS) is an old analytical technique. This paper outlines the topics involved in a parallel discussion of XEDS and EELS: basic physics, instrumentation, and specimen preparation/handling; basic quantification, advanced topics, and limitations; and future directions and applications. (DLC)
- Research Organization:
- Argonne National Lab., IL (USA)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 7130541
- Report Number(s):
- CONF-860829-39; ON: DE87001516
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400101* -- Activation
Nuclear Reaction
Radiometric & Radiochemical Procedures
CORRECTIONS
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
ENERGY-LOSS SPECTROSCOPY
ERRORS
MICROANALYSIS
MICROSCOPY
RADIATION EFFECTS
SAMPLE PREPARATION
SPECTROSCOPY
USES
X-RAY SPECTROSCOPY
400101* -- Activation
Nuclear Reaction
Radiometric & Radiochemical Procedures
CORRECTIONS
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
ENERGY-LOSS SPECTROSCOPY
ERRORS
MICROANALYSIS
MICROSCOPY
RADIATION EFFECTS
SAMPLE PREPARATION
SPECTROSCOPY
USES
X-RAY SPECTROSCOPY