Parameters affecting the electron beam sensitivity of poly(methyl methacrylate)

Journal Article · Mon Feb 28 23:00:00 EST 1977 · IBM J. Res. Dev.; (United States)

DOI:https://doi.org/10.1147/rd.212.0143· OSTI ID:7112867

Gipstein, E; Ouano, A C; Johnson, D E; Need, III, O U

Poly(methyl methacrylate), PMMA, is used as a model polymer to determine quantitatively the effect of molecular weight, molecular weight distribution, and tacticity on electron beam sensitivity. The heterotactic, syndiotactic, and isotactic stereoforms of PMMA were synthesized with molecular weights ranging from 10/sup 4/ to 10/sup 7/ and dispersivities from 1.2 to about 10. The G-values as determined by gamma radiation are about 1.3 and are independent of the three parameters. However, the solubility rate of PMMA is very dependent on the tacticity, and the relative solubility rates are in the order syndiotactic < heterotactic much less than isotactic. The weight-average molecular weight ratio was found to give a better correlation with solubility rate ratio than the number-average molecular weight ratio. The molecular size of the developer solvent was shown to have a much greater effect on the solubility rate than the molecular weight of the resist. An optimal developer solvent for PMMA can be systematically selected from a homologous series of n-alkyl acetates which enhance the resist sensitivity.

• Research Organization: IBM Research Div. Lab., San Jose, CA
• OSTI ID: 7112867
• Journal Information: IBM J. Res. Dev.; (United States), Journal Name: IBM J. Res. Dev.; (United States) Vol. 21:2; ISSN IBMJA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360406 -- Materials-- Polymers &amp; Plastics-- Radiation Effects-- (-1987)
38 RADIATION CHEMISTRY, RADIOCHEMISTRY, AND NUCLEAR CHEMISTRY
400600* -- Radiation Chemistry
BEAMS
CARBOXYLIC ACID ESTERS
CHEMICAL RADIATION EFFECTS
CHEMICAL REACTIONS
CHEMISTRY
DECOMPOSITION
ELECTRON BEAMS
ESTERS
G VALUE
LEPTON BEAMS
METHACRYLIC ACID ESTERS
METHYL METHACRYLATE
MOLECULAR WEIGHT
ORGANIC COMPOUNDS
ORGANIC POLYMERS
PARTICLE BEAMS
PHOTOSENSITIVITY
POLYACRYLATES
POLYMERS
POLYVINYLS
RADIATION CHEMISTRY
RADIATION EFFECTS
RADIOLYSIS
SENSITIVITY
SOLUBILITY