Surface and interface properties of superconducting YBa sub 2 Cu sub 3 O sub 7 minus x thin films on GaAs using yttrium stablized ZrO sub 2 /Si sub 3 N sub 4 as a buffer layer

Journal Article · Wed Jul 01 00:00:00 EDT 1992 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States)

DOI:https://doi.org/10.1116/1.578042· OSTI ID:7111136

Jia, Q X; Lee, S Y; Shi, Z Q; Anderson, W A; Shaw, D T ^[1]

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1. State University of New York at Buffalo, New York State Institute on Superconductivity, Department of Electrical and Computer Engineering, Bonner Hall, Amherst, New York 14260 (United States)

High temperature superconducting YBa{sub 2}Cu{sub 3}O{sub 7{minus}x} (YBCO) thin films have been deposited onto III--V semiconductor GaAs substrates. The deposition temperature of the YBCO layer could be increased to as high as 650 {degree}C without apparently degrading the GaAs substrate due to the use of Si{sub 3}N{sub 4} as a subbottom buffer on the GaAs surface. The growth of highly {ital c}-axis oriented YBCO films on GaAs was enhanced by using yttrium stabilized ZrO{sub 2} (YSZ) as a subtop buffer between YBCO and Si{sub 3}N{sub 4}. Surface and cross-sectional scanning electron microscopy revealed excellent surface and interface properties. The good interfaces were further confirmed using Auger electron spectroscopy depth profiling of the samples. The preservation of the GaAs surface due to the use of a dual buffer layer of YSZ/Si{sub 3}N{sub 4} after YBCO deposition was demonstrated by photoreflectance measurement on the GaAs surface after removing YBCO, YSZ, and Si{sub 3}N{sub 4} layers.

• OSTI ID: 7111136
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States) Vol. 10:4; ISSN JVTAD; ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360207 -- Ceramics
Cermets
& Refractories-- Superconducting Properties-- (1992-)
ABLATION
ALKALINE EARTH METAL COMPOUNDS
ARSENIC COMPOUNDS
ARSENIDES
BARIUM COMPOUNDS
BARIUM OXIDES
BUFFERS
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
ELECTROMAGNETIC RADIATION
FILMS
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
HIGH-TC SUPERCONDUCTORS
LASER RADIATION
MEDIUM VACUUM
NITRIDES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PNICTIDES
RADIATIONS
SILICON COMPOUNDS
SILICON NITRIDES
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
SURFACE COATING
SURFACE PROPERTIES
TRANSITION ELEMENT COMPOUNDS
VACUUM COATING
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES