Low-cost humidity sensor. Final report, September 1987-October 1991
The objective of the project was to develop a low-cost, high accuracy humidity sensor having good stability that is suitable for use in residential and commercial HVAC controls applications. Ionic polymer materials using advanced micro-electronics fabrication and design techniques were evaluated to develop a low-cost humidity sensor. The approach of using the Langmuir-Blodgett Films proved unsuccessful due to need for additional basic research in this field. Thus, the project concentrated on 'thicker' films using a spin coating approach. Based on the characterization of the sorption behavior of candidate polymer materials, the sulfonated tetrafluoroethylene perfluoroether (commercially sold by DuPont under the trademark 'Nafion') was selected as the most desirable ionic polymer material. A proprietary sensor design and fabrication process was developed using an interdigitated electrode configuration on a silicon substrate overcoated with the Nafion polymer. A number of sensors have been fabricated and tested for drift, accuracy, and chemical immunity.
- Research Organization:
- Eaton Corp., Milwaukee, WI (United States). Corporate Research and Development-Milwaukee Center
- OSTI ID:
- 7102002
- Report Number(s):
- PB-92-205772/XAB; CNN: GRI-5087-245-1518
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
320106* -- Energy Conservation
Consumption
& Utilization-- Building Equipment-- (1987-)
ACCURACY
AIR CONDITIONING
COATINGS
CONTROL
CONTROL EQUIPMENT
DEPOSITION
DESICCANTS
DESIGN
ELEMENTS
EQUIPMENT
FABRICATION
HUMIDITY CONTROL
MEASURING INSTRUMENTS
MONITORS
PERFORMANCE TESTING
POLYMERS
SEMIMETALS
SILICON
SPACE HVAC SYSTEMS
SPIN-ON COATING
SPIN-ON COATINGS
SUBSTRATES
SURFACE COATING
TESTING