Nature of the pulsed laser process for the deposition of high T/sub c/ superconducting thin films

Journal Article · Mon Oct 10 04:00:00 EDT 1988 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.100458· OSTI ID:7091259

Venkatesan, T; Wu, X D; Inam, A; Jeon, Y; Croft, M; Chase, E W; Chang, C C; Wachtman, J B; Odom, R W; di Brozolo, F R; others, and

The pulsed laser thin-film deposition process can enable preparation of thin films of complex composition with good control over the film stoichiometry. The film compositions are similar to that of the target pellet and as a consequence this technique appears to be an ideal method for preparing high T/sub c/ thin films on a variety of substrates.The factors which contribute to this beneficial phenomenon have been explored by a laser ionization mass spectrometry (LIMS) and a post ablation ionization (PAI) neutral velocity analysis technique in order to determine the mass and velocities of the laser ejected material. In addition, x-ray absorption measurements on films deposited onto substrates at room temperature were performed in order to identify the presence of short-range crystalline order in the films. Both of these studies rule out the ejection of stoichiometric clusters of material from the pellet during the laser ablation/deposition process. Instead, binary and ternary suboxides are emitted from the target pellet. These suboxides most likely have unit sticking coefficient to the substrate which could contribute to the preservation of the film stoichiometry. The velocity distribution of several neutral species (e.g., BaO) indicates that particles have energies of several eV. Thus the effective temperatures of the emitted species are approx.15 x 10/sup 3/ K, and these energetic particles may facilitate growth of the crystalline films at low substrate temperatures.

• Research Organization: Bellcore, Red Bank, New Jersey 07701
• OSTI ID: 7091259
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 53:15; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL STRUCTURE
DEPOSITION
ELECTROMAGNETIC RADIATION
EVAPORATION
FILMS
LASER RADIATION
OXIDES
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
RADIATIONS
STOICHIOMETRY
SUPERCONDUCTING FILMS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES