Unified model of the rf plasma sheath
By developing an approximation to the first integral of the Poisson equation, one can obtain solutions for the voltage-current characteristics of a radio-frequency (rf) plasma sheath that are valid over the whole range of inertial response of the ions to an imposed rf voltage or current-specified conditions. The theory adequately reproduces the time-dependent voltage-current characteristics of the two extreme cases corresponding to the Lieberman rf sheath theory and the Metze-Ernie-Oskam theory. Contained within the approximation is a time constant which controls the amount of ion response to the rf electric field. A prescription is given for determining this ion relaxation time constant, which also determines the time-dependent ion impact energy on the electrode surface.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 70709
- Report Number(s):
- SAND-95-0775; ON: DE95012114; TRN: 95:004775
- Resource Relation:
- Other Information: PBD: May 1995
- Country of Publication:
- United States
- Language:
- English
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