Apparatus and method to enhance X-ray production in laser produced plasmas

Patent · Tue Dec 29 00:00:00 EST 1992

OSTI ID:7049965

Augustoni, A L; Gerardo, J B; Raymond, T D

Method and apparatus for generating x-rays for use in, for instance, x-ray photolithography is disclosed. The method of generating x-rays includes the steps of providing a target and irradiating the target with a laser system which produces a train of sub-pulses to generate an x-ray producing plasma. The sub-pulses are of both high intensity and short duration. The apparatus for generating x-rays from a plasma includes a vacuum chamber, a target supported within the chamber and a laser system, including a short storage time laser. 8 figs.

• DOE Contract Number: AC04-76DP00789
• Assignee: Sandia Corp.-Org. 250, Albuquerque, NM (United States)
• Patent Number(s): US 5175757; A
• Application Number: PPN: US 7-571253
• OSTI ID: 7049965
• Resource Relation: Patent File Date: 22 Aug 1990
• Country of Publication: United States
• Language: English

Related Subjects

07 ISOTOPES AND RADIATION SOURCES
LASER-PRODUCED PLASMA
X RADIATION
X-RAY SOURCES
DESIGN
LASER TARGETS
USES
VACUUM SYSTEMS
ELECTROMAGNETIC RADIATION
EQUIPMENT
IONIZING RADIATIONS
PLASMA
RADIATION SOURCES
RADIATIONS
TARGETS
X-RAY EQUIPMENT
070201* - Radiation Sources- Design
Fabrication & Operation