Time of flight elastic recoil detection for thin film analysis

Journal Article · Tue Jun 01 04:00:00 EDT 1999 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.59181· OSTI ID:700995

Rabalais, M S; Peterson, Jr, D L ^[1]; Wang, Y Q ^[2]; Sheu, W J; Glass, G A ^[3]

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1. Eric Jonsson School of Engineering, University of Texas at Dallas, Dallas, Texas 75080 (United States)
2. Center for Interfacial Engineering, University of Minnesota, Minneapolis, Minnesota 55455 (United States)
3. Acadiana Research Laboratory, University of Southwestern Louisiana, Lafayette, Louisiana 70504 (United States)

Time-of-flight elastic recoil detection (TOF-ERD) is a powerful and complimentary technique to Rutherford Backscattering Spectrometry (RBS) for elemental analysis in surfaces and thin films. Its main advantages lie in its capability of not only simultaneously depth profiling light elements (3{lt}Z{lt}9) but also with a superb depth resolution (a few nm). This paper describes the construction and calibration of a TOF-ERD system recently added to the NEC 5SDH-2 1.7 MV Tandem Pelletron{reg_sign} Accelerator at the University of Southwestern Louisiana. Initial results on varying-thickness carbon thin foils using MeV gold ion beams yielded a depth resolution of approximately 3.8 nm. TOF-ERD computer software written on site to simulate spectra and to convert time spectra into depth profiles is also presented. {copyright} {ital 1999 American Institute of Physics.}

• Sponsoring Organization: USDOE
• OSTI ID: 700995
• Report Number(s): CONF-981122--
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 475; ISSN APCPCS; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

66 PHYSICS
CARBON
CONCENTRATION RATIO
ION SCATTERING ANALYSIS
ION-MOLECULE COLLISIONS
RUTHERFORD SCATTERING
THICKNESS
THIN FILMS