Surface roughness scaling of plasma polymer films
- Lawrence Livermore National Laboratory, Livermore, California 94551 (United States)
Atomic force microscopy data reveal self-affine scaling of plasma polymer films. The rms surface roughness [sigma] increases with film thickness [tau] as [sigma]([ital f][lt][xi][sup [minus]1])[similar to][tau][beta], and with measurement length [ital L] as [sigma]([ital f][gt][ital L][sup [minus]1][gt][xi][sup [minus]1])[similar to][ital L][alpha], where [xi] is the surface roughness correlation length. At the deposition rate [ital R]=2[mu][ital m]/[ital h], the scaling exponents [alpha] and [beta] are 0.9 and 0.7, both increasing to 1 at [ital R]=1[mu][ital m]/[ital h]. A competition between surface relaxation and deposition rate determine [sigma] and [xi], which increase rapidly with [ital R] or inverse temperature.
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 7005298
- Journal Information:
- Physical Review Letters; (United States), Journal Name: Physical Review Letters; (United States) Vol. 73:5; ISSN 0031-9007; ISSN PRLTAO
- Country of Publication:
- United States
- Language:
- English
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360601* -- Other Materials-- Preparation & Manufacture
360602 -- Other Materials-- Structure & Phase Studies
661300 -- Other Aspects of Physical Science-- (1992-)
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
DEPOSITION
GROWTH
MORPHOLOGY
POLYMERS
RELAXATION
ROUGHNESS
SCALING LAWS
STRESS RELAXATION
SURFACE COATING
SURFACE PROPERTIES