Thermal desorption of deuterium and helium implanted in oxide overlayers on molybdenum

Journal Article · Thu Sep 01 04:00:00 EDT 1988 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.575454· OSTI ID:6979686

Baba, Y; Sasaki, T A

The thermal desorption behaviors of deuterium and helium implanted in oxidized molybdenum have been investigated. Both ions are hardly trapped in metallic molybdenum, whereas the trapping efficiency grows with increasing oxidation temperature of molybdenum. There exist two different trapping sites in molybdenum trioxide: interstitial sites and oxygen vacancies. The ions trapped at interstitial sites desorb without surface chemical changes, whereas desorption of ions trapped in oxygen vacancies accompanies the recovery of the surface chemical state, i.e., Mo(IV)..-->..Mo(VI). The activation energies for the detrapping processes of deuterium trapped at interstitial sites and in oxygen vacancies are determined to be 0.45 and 1.0 eV, respectively.

• Research Organization: Department of Chemistry, Japan Atomic Energy Research Institute, Tokai-mura, Ibaraki-ken 319-11, Japan
• OSTI ID: 6979686
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 6:5; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360104* -- Metals & Alloys-- Physical Properties
CHEMICAL REACTIONS
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
DESORPTION
DEUTERIUM
ELEMENTS
FLUIDS
GASES
HELIUM
HYDROGEN ISOTOPES
IMPURITIES
INTERSTITIALS
ISOTOPES
LIGHT NUCLEI
METALS
MOLYBDENUM
NONMETALS
NUCLEI
ODD-ODD NUCLEI
OXIDATION
OXYGEN
POINT DEFECTS
RARE GASES
SORPTIVE PROPERTIES
STABLE ISOTOPES
SURFACE PROPERTIES
TRANSITION ELEMENTS
TRAPPING
VACANCIES