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Thermal desorption of deuterium and helium implanted in oxide overlayers on molybdenum

Journal Article · · J. Vac. Sci. Technol., A; (United States)
DOI:https://doi.org/10.1116/1.575454· OSTI ID:6979686

The thermal desorption behaviors of deuterium and helium implanted in oxidized molybdenum have been investigated. Both ions are hardly trapped in metallic molybdenum, whereas the trapping efficiency grows with increasing oxidation temperature of molybdenum. There exist two different trapping sites in molybdenum trioxide: interstitial sites and oxygen vacancies. The ions trapped at interstitial sites desorb without surface chemical changes, whereas desorption of ions trapped in oxygen vacancies accompanies the recovery of the surface chemical state, i.e., Mo(IV)..-->..Mo(VI). The activation energies for the detrapping processes of deuterium trapped at interstitial sites and in oxygen vacancies are determined to be 0.45 and 1.0 eV, respectively.

Research Organization:
Department of Chemistry, Japan Atomic Energy Research Institute, Tokai-mura, Ibaraki-ken 319-11, Japan
OSTI ID:
6979686
Journal Information:
J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 6:5; ISSN JVTAD
Country of Publication:
United States
Language:
English

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