Spatial and temporal probe for laser-generated plumes based on density gradients

Journal Article · Sun May 01 04:00:00 EDT 1988 · Anal. Chem.; (United States)

DOI:https://doi.org/10.1021/ac00160a009· OSTI ID:6977814

Chen, G; Yeung, E S

A new universal detector is reported for transient atomization events such as the laser-generated plume. A probe laser beam interrogates the density gradients, which can be monitored as a deflection of the beam in far field. A simple model is used to explain the observations. Both the shape and the magnitudes of the experimental signals are in good agreement with the predictions. As little as 1 ng of material vaporized off a silicon wafer can be detected. The technique provides insight into the laser vaporization process, because both spatial and temporal information can be derived for individual events.

• Research Organization: Iowa State Univ., Ames (USA)
• DOE Contract Number: W-7405-ENG-82
• OSTI ID: 6977814
• Journal Information: Anal. Chem.; (United States), Journal Name: Anal. Chem.; (United States) Vol. 60:9; ISSN ANCHA
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201* -- Chemical & Physicochemical Properties
ATOMIZATION
CHEMICAL REACTIONS
CRYSTALS
DATA
DECOMPOSITION
DENSITY
DISTRIBUTION
ELEMENTS
EVAPORATION
EXCIMER LASERS
EXPERIMENTAL DATA
GAS LASERS
INFORMATION
LASERS
MATHEMATICAL MODELS
MONOCRYSTALS
NUMERICAL DATA
OPTICAL PROPERTIES
PHASE TRANSFORMATIONS
PHOTOCHEMICAL REACTIONS
PHOTOLYSIS
PHYSICAL PROPERTIES
REFRACTIVITY
SEMIMETALS
SILICON
SPATIAL DISTRIBUTION