Optical functions of transparent thin films of SrTiO[sub 3], BaTiO[sub 3], and SiO[sub [ital x]] determined by spectroscopic ellipsometry
- Solid State Division, Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, Tennessee 37831 (United States)
- Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, Tennessee 37831 (United States)
- University of Tennessee, Knoxville, Tennessee 37996 (United States)
A procedure is presented for accurately determining the thickness, optical functions, and surface-roughness characteristics of thin-film insulators from two-channel spectroscopic polarization-modulation ellipsometry data. For films with minimal surface roughness, the optical functions can be determined over the entire measured spectrum; for rougher films, the analysis of the spectroscopic ellipsometry data yields meaningful values of the optical functions only in the transparent region. In general, the films must be transparent in a given range of wavelengths sampled by the ellipsometer so that at least two interference oscillations can be observed. The use of the procedure is illustrated with the determination of the optical functions of SrTiO[sub 3] and BaTiO[sub 3] thin films grown on MgO, and of SiO[sub [ital x]] films grown on Si. For SrTiO[sub 3] and BaTiO[sub 3], the thin-film results are compared with the measured optical functions of the respective bulk materials.
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 6975776
- Journal Information:
- Applied Optics; (United States), Journal Name: Applied Optics; (United States) Vol. 33:25; ISSN APOPAI; ISSN 0003-6935
- Country of Publication:
- United States
- Language:
- English
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360606* -- Other Materials-- Physical Properties-- (1992-)
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
DIMENSIONS
ELLIPSOMETRY
FILMS
MEASURING METHODS
OPTICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
ROUGHNESS
SILICON COMPOUNDS
SILICON OXIDES
STRONTIUM COMPOUNDS
STRONTIUM TITANATES
SURFACE PROPERTIES
THICKNESS
THIN FILMS
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS