Development of microwave plasma cathode for ion sources

Conference · Mon Jan 01 00:00:00 EST 1990 · Review of Scientific Instruments; (USA)

OSTI ID:6965846

Matsubara, Y; Tahara, H; Nogawa, S ^[1]; Ishikawa, J ^[2]

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1. Nissin Electric Co., Ltd., 47, Umezu-Takase-cho, Ukyo-ku, Kyoto 615, Japan (JP)
2. Department of Electronics, Kyoto University, Yoshida-honmachi, Sakyo-ku, Kyoto 606, (Japan)

A new type of electron source for ion sources, which serves as a cathode has been developed. In this cathode, a high-density microwave plasma is produced under the electron-cyclotron-resonance (ECR) condition, and a high electron current of several amperes can be extracted from it. The structure of this microwave plasma (MP) cathode is very simple and compact. A rod antenna connected to a coaxial line for introducing the microwave power (2.45 GHz) and a rare-earth metal permanent magnet for producing the ECR condition are major components. Since there is no filament in this MP cathode, it has a longer lifetime than the equivalent thermionic filament electron emitter. It offers a great advantage to the operation with reactive as well as inert gases. This MP cathode has been adapted in Kaufman-type ion source and have successfully obtained an argon ion-beam current of 110 mA and an oxygen ion-beam current of 43 mA in 25 mm diameter.

• OSTI ID: 6965846
• Report Number(s): CONF-890703-; CODEN: RSINA; TRN: 90-014389
• Journal Information: Review of Scientific Instruments; (USA), Vol. 61:1; Conference: International conference on ion sources, Berkeley, CA (USA), 10-14 Jul 1989; ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ELECTRON SOURCES
ION SOURCES
DESIGN
ARGON IONS
BEAM CURRENTS
CATHODES
DATA ANALYSIS
ELECTRON CYCLOTRON-RESONANCE
MEASURING METHODS
MICROWAVE RADIATION
OXYGEN IONS
PERMANENT MAGNETS
THERMIONIC EMISSION
CHARGED PARTICLES
CURRENTS
CYCLOTRON RESONANCE
ELECTRODES
ELECTROMAGNETIC RADIATION
EMISSION
IONS
MAGNETS
PARTICLE SOURCES
RADIATION SOURCES
RADIATIONS
RESONANCE
640301* - Atomic
Molecular & Chemical Physics- Beams & their Reactions