Sputtered superconducting films of Bi sub 2 Sr sub 2 CaCu sub 2 O sub x made by low-temperature, in-situ growth

Conference · Sun Jan 01 00:00:00 EST 1989

OSTI ID:6965194

Kampwirth, R T; Gray, K E; Andersen, P H; McDonald, D B; Miller, D J

Composite target rf magnetron sputtering has previously been successfully employed to make superconducting films of YBa{sub 2}Cu{sub 3}O{sub 7{minus}x} in-situ at substrate temperatures T{sub s} < 700{degree}C. We report the successful growth of superconducting films of Bi{sub 2}Sr{sub 2}CaCu{sub 2}O{sub x} on single crystal MgO substrates by a low-temperature process using dc magnetron sputtering from a Bi-enriched composite target. Using a substrate temperature T{sub s} {approx} 645{degree}C, metallic films with a superconducting onset of 90--100K and an extrapolated T{sub c0} = 56K have been obtained. X-ray diffraction shows the films to be c-axis oriented. Electron microscopy reveals that the films are not significantly smoother than films which were post-annealed at 865{degree}C, and that some segregation into nonsuperconducting phases had occurred. The exact mechanism by which crystallization and superconductivity occurs at such low temperatures is not yet known, but it can be speculated that the surface atoms are less constrained and thus have a smaller energy barrier to overcome in forming a crystal structure. 9 refs., 4 figs., 1 tab.

• Research Organization: Argonne National Lab. (ANL), Argonne, IL (United States)
• Sponsoring Organization: DOE/CE; DOE/ER
• DOE Contract Number: W-31109-ENG-38
• OSTI ID: 6965194
• Report Number(s): CONF-891093-28; ON: DE90010092
• Resource Relation: Conference: 36. American Vacuum Society national vacuum symposium, Boston, MA (USA), 23-27 Oct 1989
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BISMUTH OXIDES
SPUTTERING
CALCIUM OXIDES
COPPER OXIDES
HIGH-TC SUPERCONDUCTORS
STRONTIUM OXIDES
IN-SITU PROCESSING
SUBSTRATES
SUPERCONDUCTING FILMS
X-RAY DIFFRACTION
ALKALINE EARTH METAL COMPOUNDS
BISMUTH COMPOUNDS
CALCIUM COMPOUNDS
CHALCOGENIDES
COHERENT SCATTERING
COPPER COMPOUNDS
DIFFRACTION
FILMS
OXIDES
OXYGEN COMPOUNDS
PROCESSING
SCATTERING
STRONTIUM COMPOUNDS
SUPERCONDUCTORS
TRANSITION ELEMENT COMPOUNDS
360201* - Ceramics
Cermets
&amp; Refractories- Preparation &amp; Fabrication
656003 - Condensed Matter Physics- Interactions between Beams &amp; Condensed Matter- (1987-)