Structure studies of thin amorphous films by synchrotron x-ray absorption and analytical electron microscopy

Technical Report · Wed Jan 01 00:00:00 EST 1986

OSTI ID:6957904

Heald, S M; Tafto, J

We combine the techniques of EXAFS and XANES using synchrotron x-rays, and the corresponding techniques using electron energy loss spectroscopy (EXELFS and ELNES) to characterize and study the local atomic arrangement in thin amorphous films. These probes are complementary in that x-rays are best suited for absorption edges above 3 keV and electron energy loss spectroscopy for low energy edges, and thus this combination is very useful for amorphous materials containing both low and high Z elements. We use in addition transmission electron microscopy, electron diffraction, and electron energy loss spectroscopy in the low energy loss region. Results from amorphous TiO/sub 2/ and amorphous SnO/sub 2/ made by reactive sputtering are presented. 6 refs., 7 figs.

• Research Organization: Brookhaven National Lab., Upton, NY (USA)
• DOE Contract Number: AC02-76CH00016; AS05-80ER10742
• OSTI ID: 6957904
• Report Number(s): BNL-39075; CONF-861207-24; ON: DE87004181
• Resource Relation: Conference: Materials Research Society fall meeting, Boston, MA, USA, 1 Dec 1986; Other Information: Paper copy only, copy does not permit microfiche production
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
TIN OXIDES
ENERGY-LOSS SPECTROSCOPY
TITANIUM OXIDES
EXPERIMENTAL DATA
SYNCHROTRON RADIATION
THIN FILMS
X-RAY SPECTRA
BREMSSTRAHLUNG
CHALCOGENIDES
DATA
ELECTROMAGNETIC RADIATION
ELECTRON SPECTROSCOPY
FILMS
INFORMATION
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
RADIATIONS
SPECTRA
SPECTROSCOPY
TIN COMPOUNDS
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
656003* - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-)