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Sputtering of condensed rare gases by keV charged particles

Thesis/Dissertation ·
OSTI ID:6939608
Measurements were made of the absolute total yield and ejected particle energy spectra for argon, krypton and xenon solids sputtered by 33-ke V He{sup +}, Ne{sup +}, Ar{sup +}, Kr{sup +} and Xe{sup +} ions, as well as energy spectra for 2.5-keV electrons incident on these solids. For the heavier incident ions (Ne-Xe), the energy spectra are combined with the measured total yields to produce total yield curves that are differential in the ejected particle energy. These absolute ejected particle energy spectra are then compared to the predictions of the standard collision cascade theory of sputtering, providing a much more critical test of the model than when the total yield and energy spectra are compared with the theory separately. The ejected particle energy spectra for these solids bombarded by keV electrons and He{sup +} ions provide detailed information about the sputtering mechanism for electronically excited rare gas solids. The observation of clear peaks in the energy spectra of these targets at higher ejection energies reveals that repulsive decays of a very definite energy are a major contributor to the electronic sputtering mechanism. The widths and positions of the peaks in all three solids are related to the measured VUV luminescence produced by the decay of excited dimers in the electronically rare gas solids.
Research Organization:
Virginia Univ., Charlottesville, VA (USA)
OSTI ID:
6939608
Country of Publication:
United States
Language:
English

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Related Subjects

656003* -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ARGON
ARGON IONS
CATIONS
CHARGED PARTICLES
COLLISIONS
COMPARATIVE EVALUATIONS
DIMERS
ELECTRONS
ELEMENTARY PARTICLES
ELEMENTS
ENERGY RANGE
ENERGY SPECTRA
FERMIONS
FLUIDS
GASES
HELIUM IONS
IONS
KEV RANGE
KEV RANGE 10-100
KRYPTON
KRYPTON IONS
LEPTONS
LUMINESCENCE
NEON IONS
NONMETALS
RARE GASES
SOLIDS
SPECTRA
SPUTTERING
XENON
XENON IONS