Electron beam induced surface nucleation and low-temperature decomposition of metal carbonyls
The kinetics of low-energy electron beam induced metal film nucleation have been investigated. Experiments performed were the deposition of Fe and Cr from Fe(CO)/sub 5/ and Cr(CO)/sub 6/, respectively. It was found that the activation energy for the autocatalytic thermal decomposition of these compounds was lower than the activation energy for decomposition on Si surface. The autocatalytic activation energies were measured as 0.14 eV for Fe(CO)/sub 5/ and 1.02 eV for Cr(CO)/sub 6/. The electron beam induced nucleation, together with the rapid autocatalytic decomposition, allowed for selective area metal film growth. A qualitative model based on classical nucleation theory describes well the effect of electron irradiation in inducing film growth. The electron beam induced nucleation step has been modeled in more detail and shows a t/sup 4/ dependence for the early stages of film growth, in agreement with the observed data.
- Research Organization:
- Department of Chemistry, University of North Carolina, Chapel Hill, North Carolina 27599
- OSTI ID:
- 6934928
- Journal Information:
- J. Vac. Sci. Technol., B; (United States), Journal Name: J. Vac. Sci. Technol., B; (United States) Vol. 6:5; ISSN JVTBD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360106* -- Metals & Alloys-- Radiation Effects
BEAMS
CARBONYLS
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
CHROMIUM
CHROMIUM COMPOUNDS
COATINGS
DEPOSITION
ELECTRON BEAMS
ELEMENTS
GOLD
IRON
IRON COMPOUNDS
LEPTON BEAMS
METALS
NUCLEATION
PARTICLE BEAMS
PHYSICAL RADIATION EFFECTS
RADIATION EFFECTS
SEMIMETALS
SILICON
SURFACE COATING
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
VAPOR DEPOSITED COATINGS