Oxygen diffusion into oxygen-deficient Ba/sub 2/YCu/sub 3/O/sub 7-//sub x/ films during plasma oxidation

Journal Article · Mon Aug 29 04:00:00 EDT 1988 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.100152· OSTI ID:6926811

Yoshida, A; Tamura, H; Morohashi, S; Hasuo, S

We studied the speed of oxygen diffusion into deoxygenated Ba/sub 2/ YCu/sub 3/ O/sub 7-//sub x/ films during plasma oxidation. The films were deoxygenated by annealing in N/sub 2/ or Ar and treated in an oxygen plasma. The sample was below 160 /sup 0/C during the plasma oxidation. The deoxygenated film was tetragonal and exhibited semiconductivity. Plasma oxidation changed the crystal structure of the film from tetragonal to orthorhombic, and restored superconductivity and metallic behavior in the oxygen deficient film. The change in composition variable x calculated from the weight gain during plasma oxidation was about 0.6. The effective diffusion constant for oxygen indiffusion estimated from the time dependence of weight gain was on the order of 10/sup -12/ cm/sup 2/ /s.

• Research Organization: Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi 243-01, Japan
• OSTI ID: 6926811
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 53:9; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
360205 -- Ceramics
Cermets
& Refractories-- Corrosion & Erosion
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
ARGON
ATOM TRANSPORT
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHEMICAL REACTIONS
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL-PHASE TRANSFORMATIONS
DIFFUSION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
FLUIDS
GASES
HEAT TREATMENTS
HIGH TEMPERATURE
LOW TEMPERATURE
MEDIUM TEMPERATURE
NEUTRAL-PARTICLE TRANSPORT
NITROGEN
NONMETALS
OXIDATION
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
RADIATION TRANSPORT
RARE GASES
SUPERCONDUCTIVITY
TRANSITION ELEMENT COMPOUNDS
VERY HIGH TEMPERATURE
VERY LOW TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES