Production of high-quality amorphous silicon films by evaporative silane surface decomposition
High-quality hydrogenated amorphous silicon films (a-Si:H) have been produced by decomposition of low-pressure silane gas on a very hot surface with deposition on a nearby, typically 210 /sup 0/C substrate. A high-temperature tungsten filament provides the surface for heterogeneous thermal decomposition of the low-pressure silane and subsequent evaporation of atomic silicon and hydrogen. These evaporated species (primarily) induce a-Si:H growth on nearby substrates which are temperature controlled using a novel substrate holder. The light and dark conductivities, optical band gap, deposition rates, and light-soaking effects of preliminary films are reported. The decomposition-evaporation process has been examined using a mass spectrometer to directly detect the decomposition rate and the evaporated radical species. Based on this data and other information, a simplified model for the deposition process is suggested. The excellent film quality and the attributes of the deposition process make this technique, which was originally suggested by Wiessman, viable for the fast rate, large-area deposition of a-Si:H for solar cells and other applications.
- Research Organization:
- Joint Institute for Laboratory Astrophysics, University of Colorado and National Bureau of Standards, Boulder, Colorado 80309-0440
- OSTI ID:
- 6926629
- Journal Information:
- J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 64:6; ISSN JAPIA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
140501 -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
CHEMICAL COATING
CHEMICAL REACTIONS
CHEMICAL VAPOR DEPOSITION
DECOMPOSITION
DEPOSITION
DIRECT ENERGY CONVERTERS
ELEMENTS
ENERGY GAP
EQUIPMENT
FABRICATION
HYDRIDES
HYDROGEN COMPOUNDS
METALS
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING
TRANSITION ELEMENTS
TUNGSTEN